Abstract
We are researching new flow control valve which is small in size, lightweight and can control air flow proportionally. That valve has simple structure to control flow rate using particle excitation by PZT vibrator. In this research, we have devised the method of controlling optional flow rate stably. However, previously control method had problem with responsibility. In this report, we aimed to improve the valve responsibility. And we devised a new driving method to modulate flow rate by controlling motion of particles on orifices.