2017 JSPE Spring Conference
Session ID : D82
Conference information
Host: The Japan Society for Precision Engineering
Name : 2017 JSPE Spring Conference
Date : March 13, 2017 - March 15, 2017
Ultra-precise Positioning over a One-Millimeter Stroke Using Flexure Guide and Electromagnetic Actuator
6th report, Fabrication of 4-axes mechanism applied to surface topography measuring system
Keywords:
positioning,
flexure guide,
voice coil motor,
millimeter stroke,
surface topography measurement
Details
