Proceedings of JSPE Semestrial Meeting
2017 JSPE Spring Conference
Session ID : E26
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Host: The Japan Society for Precision Engineering

Name : 2017 JSPE Spring Conference

Date : March 13, 2017 - March 15, 2017

Fabrication of multi-electrode array using backside exposure
*Mikiya Kurosaka, Yasuko Yanagida, Jongho Park, Takeshi Hatsuzawa
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Keywords: backside exposure, SU-8, diffracted light, high aspect ratio, multi-electrode array, bio sensor
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[in Japanese]
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© 2017 The Japan Society for Precision Engineering
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