Proceedings of JSPE Semestrial Meeting
2017 JSPE Spring Conference
Session ID : F20
Conference information

Host: The Japan Society for Precision Engineering

Name : 2017 JSPE Spring Conference

Date : March 13, 2017 - March 15, 2017

Computational Analysis of Chemical Reactions between Abrasive Grain and Substrate during GaN CMP
*Takuya Igarashi, Kentaro Kawaguchi, Yusuke Ootani, Yuji Higuchi, Nobuki Ozawa, Momoji Kubo
Author information
Keywords: first-principles calculation, GaN, CMP
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (559K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2017 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top