2017 JSPE Spring Conference
Session ID : G69
Conference information
Host: The Japan Society for Precision Engineering
Name : 2017 JSPE Spring Conference
Date : March 13, 2017 - March 15, 2017
Evaluation of Slurry Flow behavior in Chemical Mechanical Polishing of Hard to Process Material
Impact Analysis of Polishing Pad Characteristics and Slurry Characteristics in Consumable Materials
*Yuichi Tomiie, Michio Uneda, Kazutoshi Hotta, Kazusei Tamai, Hitoshi Morinaga, Ken-ichi Ishikawa
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