Abstract
It has been reported that the effect of ultrasonic vibration grinding for brittle material such as ceramics and glass on suppression of loading and reduction of grinding force. However, it is both temporally and spatially difficult to observe directly the processing phenomenon. Furthermore, the typical dynamometer to measure the grinding force has insufficient frequency response to detect ultrasonic frequency band. In this research, we combine the two technique in order to realize fast observation of stress distribution change, photo-elasticity and computed tomography. In this report, the possibility of reconstruction of stress distribution change under small diameter drilling on glass by electro-deposited diamond tool is verified.