Effect of substrate materials on the growth of c-BN thin films using rf magnetron sputtering

Abstract

We have been trying to grow c-BN films onto (001) Si substrates using rf magnetron sputtering of a pyrolytic BN target. The purpose of this work is to clarify the effect of substrate materials on c-BN film growth. Systematical investigations showed that deposition of BN films containing high c-BN fraction on stainless steel was more difficult than on Si substrate. It was also found that an intermediate layer of h-BN enhanced adhesion between c-BN films and substrates.