2017 JSPE Spring Conference
Session ID : B06
Conference information
Host: The Japan Society for Precision Engineering
Name : 2017 JSPE Spring Conference
Date : March 13, 2017 - March 15, 2017
Sub-micro meter scale fabrication by irradiating local fine atmospheric pressure plasma jets mixed with additive gases
*Daisuke Morimatsu, Hiromitsu Sugimoto, Atsushi Nakamura, Akihisa Ogino, Masaaki Nagatsu, Futoshi Iwata
Author information
Details
