Fabrication and evaluation of molding and bonding tools for Au micromirror formation

Abstract

Fabrication process of Au micromirrors on arbitrary substrates using a method of molding and simultaneous low-temperature bonding of Au microrods has been developing. In this method, surface profile and surface roughness of molding and bonding tools are important parameters that determine the performance of Au micromirrors. V shaped grooves were fabricated on the Si and glass wafers and surface roughness was evaluated under the various fabrication conditions.