Host: The Japan Society for Precision Engineering
Name : 2018 JSPE Autumn Conference
Location : [in Japanese]
Date : September 05, 2018 - September 07, 2018
Pages 569-570
In order to reduce wavefront error caused by atmospheric turbulence, we have developed a Shack-Hartmann wavefront sensor (SHWFS) for low pressure environment. To guarantee the accuracy of measurement wavefront, we prepared the distorted mirror defined with the 12th order Zenrnike polinominal. The mirror was measured by both the interferometer and the SHWFS as common reference. However these measurements were performed in air because the interferometer can not be used in vacuum. As a result, the wavefront measured by the interferometer and the SHWFS was in good agreement with the residual of sigma = 0.003 lambda r.m.s.
