2019 JSPE Autumn Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2019 JSPE Autumn Conference
Location : [in Japanese]
Date : September 04, 2019 - September 06, 2019
Research of High Efficiency Polishing Method of SiC Substrate by Nanobubbles Slurry Added with Ozone Gas
Keywords:
Chemical Mechanical Polishing,
Silicon Carbide,
Removal Rate,
Nanoindentation Test,
Ozone gas,
Nanobubbles
Pages 26-27
Details
