Proceedings of JSPE Semestrial Meeting
2019 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2019 JSPE Autumn Conference

Location : [in Japanese]

Date : September 04, 2019 - September 06, 2019

Proposal and study on force control method for hybrid electric-pneumatic ultra-precision vertical positioning stage
*Youwei Xu, Tomonori Kato, Tomohiro Tanaka, Kohei Shimazaki
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Keywords: Ultra-precision positioning, Hybrid electric-pneumatic system, Force control, Disturbance observer
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 452-453

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Abstract
[in Japanese]
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© 2019 The Japan Society for Precision Engineering
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