Proceedings of JSPE Semestrial Meeting
2019 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2019 JSPE Autumn Conference

Location : [in Japanese]

Date : September 04, 2019 - September 06, 2019

Effect of acceleration voltage on preparation of carbon nitride film by IBAD
*Ippei Tanaka, Yasunori Harada
Author information
Keywords: carbon nitride, IBAD, PVD
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 7-8

Details
Download PDF (591K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract

[in Japanese]

Content from these authors
© 2019 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top