Proceedings of JSPE Semestrial Meeting
2019 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2019 JSPE Autumn Conference

Location : [in Japanese]

Date : September 04, 2019 - September 06, 2019

Study on slicing process of Si using oxidation accelerator
*Naomichi Tokumoto, Masakazu Kurashima, Hitoshi Suwabe, Tomohisa Katou, Ken-ichi Ishikawa
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Keywords: cutting, diamond grain, wire tool, oxidation accelerator
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 70-71

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Abstract

[in Japanese]

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© 2019 The Japan Society for Precision Engineering
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