Proceedings of JSPE Semestrial Meeting
2020 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2020 JSPE Autumn Conference

Location : [in Japanese]

Date : September 01, 2020 - September 07, 2020

Evaluation of Microchannel on Fused Silica Substrate by CO2 Laser Processing
*Yumi Takamatsu, Ryoji Kitada, Satoshi Amaya
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Keywords: Microchannel, CO2 laser, Fused silica
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 221-222

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[in Japanese]
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© 2020 The Japan Society for Precision Engineering
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