2020 JSPE Autumn Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2020 JSPE Autumn Conference
Location : [in Japanese]
Date : September 01, 2020 - September 07, 2020
Measurement of fine particulate defects with autonomous search and split multi-probe
Analysis on characteristics in detection of nanoscale defects on Si wafer by highly sensitive observation system using phase information
Chikara Odagiri, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi
Author information
Pages 366-367
Details
