Proceedings of JSPE Semestrial Meeting
2020 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2020 JSPE Autumn Conference

Location : [in Japanese]

Date : September 01, 2020 - September 07, 2020

Low-temperature direct bonding of β-Ga2O3 and diamond surfaces
*Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Hitoshi Umezawa, Koji Tanaka, Toshimitsu Ito, Hideyuki Watanabe, Eiji Higurashi
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Keywords: β-Ga2O3, Diamond, Low-temperature direct bonding
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 486

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[in Japanese]

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© 2020 The Japan Society for Precision Engineering
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