2020 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2020 JSPE Spring Conference
Location : [in Japanese]
Date : March 17, 2020 - March 19, 2020
Potential change of glass by polishing using thermally oxidized silicon
Keywords:
glass,
chemical mechanical polishing,
thermally oxidized silicon,
colloidal silica,
potential change
Pages 143
Details
