Host: The Japan Society for Precision Engineering
Name : 2020 JSPE Spring Conference
Location : [in Japanese]
Date : March 17, 2020 - March 19, 2020
Pages 25-26
The paper aims to show the possibility of the actuation and the measurement of mechanical step displacements of 10 picometers or less than using a designed piezoelectric (PZT) driving stage and heterodyne interferometry. In our experiment, we use a designed parallel spring stage made by LEX-ZERO (low thermal expansion material) with a high-voltage PZT actuator (0 to -1000 V) to generate mechanical displacements with a step of 10 pm or less than. For a measurement system to achieve these picometer-order displacement measurements, the proposed single phase-locked loop [1] developed on a field-programmable gate array (FPGA) platform aiming to high-resolution phase measurement is used, and a modified heterodyne interferometer with two spatially separated beams is established. Both the actuation and measurement systems are located inside a vacuum chamber for suppressing environmental fluctuations that impact the measurement results. In this paper, the design, instrumentation, and experimental results are discussed. Reference [1] T-D Nguyen, et al., Direct phase determination using phase lock loop for heterodyne displacement-measuring interferometers, Proceedings of Photonic Asia Conference, 2018.