Driving control system for an ultrasonic linear motor with a quadruped stator

Abstract

This paper proposes a control method for a linear ultrasonic motor with quadruped stator, especially for low speed drive. First longitudinal (L1) mode and the first-second bending (B1-2) modes are used to produce elliptical motions on both sides of the stator for driving the slider. Because two vibration modes can be controlled independently, we analyzed the influence of two vibration modes on the movement of the slider. In this paper, we discussed concerning how to combine these two vibration modes to drive the slider for a low speed driving. The experiment results show that the dead zone of slider speed can be reduced by adjusting the ratio between vibration amplitude of L1 and B1-2 mode, and by using proposed control system, the slider can be driven at a lower speed with stable operation.