Proceedings of JSPE Semestrial Meeting
2021 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2021 JSPE Autumn Conference

Location : [in Japanese]

Date : September 21, 2021 - September 27, 2021

Development of a precise positioning stage utilizing micro-pitch screw mechanism
*Jun Okubo, Satoshi Honda
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Keywords: micro screw, micro nut, MEMS, extra fine wire, positioning stage, KURUTOGA engine
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 381-382

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Abstract
[in Japanese]
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© 2021 The Japan Society for Precision Engineering
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