Proceedings of JSPE Semestrial Meeting
2021 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2021 JSPE Autumn Conference

Location : [in Japanese]

Date : September 21, 2021 - September 27, 2021

Measurement of periodic error in displacement measuring interferometer by frequency scanning
*Takuma Fukunaga, Myagmarskh Munkhbaatar, Masato Higuchi, Katsunari Katagiri, Dong Wei, Masato Aketagawa
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Keywords: periodic error, Displacement measurement optical interferometer, frequency scan
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 571-572

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Abstract
[in Japanese]
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© 2021 The Japan Society for Precision Engineering
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