Proceedings of JSPE Semestrial Meeting
2021 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2021 JSPE Spring Conference

Location : [in Japanese]

Date : March 16, 2021 - March 22, 2021

Mechanism of inner modification in borosilicate glass with UV nanosecond laser
*Kohki Sawada, Hirofumi Hidai, Souta Matsusaka, Noboru Morita, Akira Chiba
Author information
Keywords: UV pulsed laser, Borosilicate glass, etching, laser inside modification
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 351-352

Details
Download PDF (1092K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2021 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top