Proceedings of JSPE Semestrial Meeting
2021 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2021 JSPE Spring Conference

Location : [in Japanese]

Date : March 16, 2021 - March 22, 2021

Attachment of thin film to curved surface using electrostatic chuck with collective beam structure
*Terumichi Hayashi, Yuki Taoka, Shigeki Saito
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Keywords: Electrostatic force, Electrostatic chuck, Collective beam structure, Thin film manipulation, 3D printing
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 531-532

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[in Japanese]
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© 2021 The Japan Society for Precision Engineering
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