2021 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2021 JSPE Spring Conference
Location : [in Japanese]
Date : March 16, 2021 - March 22, 2021
The effect of a target polymer film’s surface conductivity on the attractive force generated by a bipolar electrostatic chuck
Keywords:
Electrostatic force,
Electrostatic chuck,
Thin film manipulation,
Conductive film,
Polymer film,
3D printing
Pages 537-538
Details
