Proceedings of JSPE Semestrial Meeting
2022 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2022 JSPE Autumn Conference

Location : [in Japanese]

Date : September 07, 2022 - September 09, 2022

Simple control system design for high-speed and high-precision control of a stage installed on a machine base
*Kaiji Sato, Ryouhei Hisamatsu, Kaoru Akamatsu
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Keywords: Vibration, Linear motion stage, High speed, Precision control, Machine base, NCTF control
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 151-152

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Abstract
[in Japanese]
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© 2022 The Japan Society for Precision Engineering
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