2022 JSPE Autumn Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2022 JSPE Autumn Conference
Location : [in Japanese]
Date : September 07, 2022 - September 09, 2022
Topography measurement and processing system using ultraprecision 4-axis positioning mechanism driven by flexure guide and electromagnetic actuator
3rd Report，Positioning performance under various conditions
Keywords:
positioning,
flexure guide,
voice coil motor,
millimeter stroke,
surface topography measurement,
scratching process
Pages 155-156
Details
