Measurement of adhesion force on solid surface with micro tip

Abstract

The direct measurement of interaction force between two solid surfaces is capable by using atomic force microscopy (AFM). The adhesion force and adsorption force between both surfaces of a silicon tip and a smooth silicon flat are measured, using the atomic force microscope. The result showed that it is found by measuring the force curve that the adhesion force changes depending on the size of the tip radius of curvature. And influence of relative humidity on micro tip adsorption is investigated.