Proceedings of JSPE Semestrial Meeting
2022 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2022 JSPE Autumn Conference

Location : [in Japanese]

Date : September 07, 2022 - September 09, 2022

Ultrasonic cleaning of silicon wafers by DPLUS
*Kyohei Yamada, Kang Chen, Susumu Miyake, Kazunari Suzuki, Takeshi Morita
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Keywords: DPLUS, Ultrasonic cleaning, Ultrasonic focusing, Piezoelectric device, Cavitation
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 22-23

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[in Japanese]
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© 2022 The Japan Society for Precision Engineering
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