Proceedings of JSPE Semestrial Meeting
2022 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2022 JSPE Autumn Conference

Location : [in Japanese]

Date : September 07, 2022 - September 09, 2022

Development of fine positioning table supported by squeezed air films based on levitation force control (6th report)
Properties of small-step displacement feed
*Yuma Tamaru, Tomohiro Ushijima, Hiroki Shimizu
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Keywords: Squeezed-air effect, Fine positioning, Non-contact support, Piezo element
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 28-29

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[in Japanese]
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© 2022 The Japan Society for Precision Engineering
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