2022 JSPE Autumn Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2022 JSPE Autumn Conference
Location : [in Japanese]
Date : September 07, 2022 - September 09, 2022
Nanoscratch Characteristics of C-plabe Sapphire Substrate
Scratch Anisotropy in nm Order Feeding
*Kengo Saegusa, Wangpiao Lin, Naohiko Yano, Jun Shimizu, Kazuki Kaneko, Libo Zhou, Teppei Onuki, Hirotaka Ojima, Takeyuki Yamamoto
Author information
Pages 345-346
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