Proceedings of JSPE Semestrial Meeting
2022 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2022 JSPE Autumn Conference

Location : [in Japanese]

Date : September 07, 2022 - September 09, 2022

Visualization of flow in lowerside cleaning of semiconductor wafers
*Ren Okano, Kenji Amagai, Ayako Yano, Manabu Tsujimura, Hirokuni Hiyama, Akira Fukunaga, Yutaka Wada, Masayosi Imai, Satomi Hamada, Naoyuki Handa, Tomoya Nishi
Author information
Keywords: Semiconductor, silicon wafer, Lower side cleaning, Visualization
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 378-379

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[in Japanese]
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© 2022 The Japan Society for Precision Engineering
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