2022 JSPE Autumn Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2022 JSPE Autumn Conference
Location : [in Japanese]
Date : September 07, 2022 - September 09, 2022
Characterization of GaN polishing assisted by UV direct irradiation 4th report
Evaluation of processing properties due to changes in pH and oxidizer Translation
*Shougo Kawamura, Shinsuke Matsui, Eiiti Yamamoto, Tosiyasu Yajima, Daisuke Ninomiya
Author information
Pages 384-385
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