2022 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2022 JSPE Spring Conference
Location : [in Japanese]
Date : March 15, 2022 - March 17, 2022
3D shape measurement of the surface of the block gauge using diffusely reflected light and wavelength shift interferometer
Keywords:
speckle interferometer,
phase extraction,
measurement accuracy,
mirror surface,
diffusely reflected light
Pages 164-165
Details
