Research on strain gauge embed on manipulators for microforce measurement

Abstract

The hardness of cells has a strong correlation with diseases, and it is required to establish a method for measuring cell hardness. In this research, an end effector for a small robot arm was developed. Furthermore, I am aiming to develop a micromanipulator that can measure reaction force. A semiconductor strain gauge suitable for microforce measurement and a micromanipulator with a shape suitable for cell manipulation will be manufactured at the same time using MEMS technology. As a result, physical grip and reaction force measurement became possible.