Proceedings of JSPE Semestrial Meeting
2022 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2022 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2022 - March 17, 2022

Development of a Fabry-Perot Optical Fiber Probe for Micro Metrology
Performance evaluation of a prototype probe
*Hiroshi Murakami, Akio Katsuki, Takao Sajima, Yumi Hattori
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Keywords: Fabry-perot, Optical fiber, Fiber probe, Measurement, Micro CMM, Micro and nano structure
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 243

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[in Japanese]
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© 2022 The Japan Society for Precision Engineering
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