Host: The Japan Society for Precision Engineering
Name : 2022 JSPE Spring Conference
Location : [in Japanese]
Date : March 15, 2022 - March 17, 2022
Pages 255-256
We develop an alignment monitor which can detect fluctuations of micrometer in a severe environment of high magnetic field and vacuum for a term longer than several months. It consists of a 3-dimensional measurement grid of multiple optical fiber introduced absolute distance interferometers based on an optical frequency comb. Here, we evaluate a prototype of a ball lens module, which configures the measurement paths of the interferometers.