Proceedings of JSPE Semestrial Meeting
2022 JSPE Spring Conference
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Precise alignment monitor based on an optical frequency comb (8th report)
Evaluation for prototypes of the optical module
*Tatsuya KumeTsutomu MibeMasaki MichihataSatoru Takahashi
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Pages 255-256

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Abstract

We develop an alignment monitor which can detect fluctuations of micrometer in a severe environment of high magnetic field and vacuum for a term longer than several months. It consists of a 3-dimensional measurement grid of multiple optical fiber introduced absolute distance interferometers based on an optical frequency comb. Here, we evaluate a prototype of a ball lens module, which configures the measurement paths of the interferometers.

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© 2022 The Japan Society for Precision Engineering
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