Fabrication of transparent resin microscale structure for observation with a transmission microscope

Abstract

Precise measurement is possible with a MEMS device fabricated by silicon etching. However, it is difficult to observe with a general transmission microscope due to the nature of the material. In this research, we made it possible to fabricate a highly transparent micro structure made of epoxy resin on a glass substrate. The fabrication method can be done by general photolithography, and the floating structure can be fabricated. It is also possible to directly observe biomaterials by taking advantage of their highly transparent properties.