Proceedings of JSPE Semestrial Meeting
2022 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2022 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2022 - March 17, 2022

Development of fine positioning table supported by squeezed air films based on levitation force control (5th report)
Properties of long-stroke feed
*Yuma Tamaru, Tomohiro Ushijima, Hiroki Shimizu
Author information
Keywords: Squeezed-air effect, Fine positioning, Non-contact support, Piezo element
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 680-681

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Abstract
[in Japanese]
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© 2022 The Japan Society for Precision Engineering
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