Proceedings of JSPE Semestrial Meeting
2022 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2022 JSPE Spring Conference

Location : [in Japanese]

Date : March 15, 2022 - March 17, 2022

Impact of impurities in hydrogen gas on Si nanocone formation process using intermediate-pressure hydrogen plasma
*Naoki Tamura, Toshimitsu Nomura, Hiroaki Kakiuchi, Hiromasa Ohmi
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Keywords: silicon, nanocone, hydrogen plasma
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 81

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[in Japanese]

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© 2022 The Japan Society for Precision Engineering
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