Convergence Technology of Inward Plasma Using Magnetic Lens

Abstract

Plasma technology for microfabrication has been used for semiconductor failure analysis and other applications, and there is a need to focus the plasma more narrowly for higher precision and finer processing. In this study, we investigated a magnetic field lens that converges the plasma, aiming to refine the plasma by using a magnetic mirror. It was confirmed that the inward plasma passing through the prototype magnetic lens converged, and the effectiveness of plasma convergence by the magnetic mirror was clarified.