Grasping of filling behavior of UV nanoimprint when transfer pressure is changed by bridging structure

Abstract

The problem with UV-NIL is that mold release treatment increases water repellency and air bubbles are generated during NIL. Therefore, it is important to observe the filling behavior of UV-curable resin into UV-NIL mold. Therefore, in this study, in order to improve the durability and sagging, which were problems in the previous study, we created a bridging structure using SU-8, a negative resist, and applied UV-NIL when the transfer pressure was finely changed. We have investigated the filling behavior at time, and report it