Proceedings of JSPE Semestrial Meeting
2023 JSPE Autumn Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2023 JSPE Autumn Conference

Location : [in Japanese]

Date : September 13, 2023 - September 15, 2023

Development of the optical setup for interference lithography with active wavefront control
Nozomu Takahiro, *Yuki Shimizu
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Keywords: Interference lithography, Spatial light modulator, Interference fringe pattern
CONFERENCE PROCEEDINGS RESTRICTED ACCESS

Pages 512

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Abstract

[in Japanese]

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© 2023 The Japan Society for Precision Engineering
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