Measurement of Micro-contacts on High-hardness Solid Surfaces Using Sputtered Thin Film

Abstract

In this study, a technique is proposed to realize the detection of the micro-contacts. The technique for detecting the contacts is based on the principle using transfers between sputtered thin films coated on both of contact surfaces. The micro-contacts between both surfaces of a rough ceramics ball and a smooth glass flat are observed and measured, using the proposed technique. After indentation, surface images of contacts were measured on the glass surface by an optical microscope and SPM. The result showed that it is found that micro-contacts of less than submicron in lateral size can be clearly detected by using the technique.