Vacuum evacuation characteristics of a miniature ion pump with high-efficiency plasma source

Abstract

Quantum sensors or computers using cold atom are attracted attention in recent years. An ultra-high vacuum environment of less than 10-6 Pa is required to handle cold atoms. To contribute miniaturization of quantum devices, we have been developing a miniature ion pump with a high-efficiency plasma source that can evacuate the cold atom generation chamber down to the ultra-high vacuum environment. In this report, we present the vacuum evacuation characteristics obtained by measuring the discharge current of the ion pump.