2023 JSPE Autumn Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2023 JSPE Autumn Conference
Location : [in Japanese]
Date : September 13, 2023 - September 15, 2023
[title in Japanese]
*Kyota Yoshinaga, Yoko Takeo, Kai Sakurai, Jordan Tyler O’Neal, Yu Nakata, Takenori Shimamura, Satoru Egawa, Yasunori Senba, Haruhiko Ohashi, Takashi Kimura
Author information
Keywords:
Multi-aperture grating,
Ultra-high groove-density,
Variable line-spacing,
Ultrarapid electron beam lithography,
Synchrotron radiation,
Soft X-ray spectromicroscopy
Pages 575
Details
