Passive Near-Field Spectroscopic Analysis on Dielectrics

Abstract

Dielectrics are widely used in nanoscale circuits in electrical and electronic industries. The nanoscale dynamics of dielectrics is fundamental to understanding nanoscale systems and devices. We have developed a long-wave infrared spectroscopic system with our passive scattering-type scanning near-field optical microscope (s-SNOM), which can directly detect evanescent waves without any external light sources. The near-field signal results obtained by s-SNOM can reflect the EM-LDOS of the material. The intensity of the near-field signal will decrease as the distance from surface increases. The resulting near-field attenuation curve can obtain the localized characteristic information of the electromagnetic wave localized on the sample surface. In this study, we aim to perform spectroscopic on AlN around 12 μm because it is close to the surface phonon resonance wavelength of AlN. In the presentation, we have a discussion with the spectroscopic singals.