2023 JSPE Autumn Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2023 JSPE Autumn Conference
Location : [in Japanese]
Date : September 13, 2023 - September 15, 2023
Molecular dynamics simulation of CMP focusing on contact types between an abrasive and a substrate
*Koichi Masuya, Masashi Obuchi, Chikako Takatoh, Akira Fukunaga, Ryo Tanimura, Atsushi Kubo, Yoshitaka Umeno
Author information
Pages 679-680
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