2023 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2023 JSPE Spring Conference
Location : [in Japanese]
Date : March 14, 2023 - March 16, 2023
Evaluation of Design and Conditions of Bipolar Electrostatic Chuck with a Compliant Beam-Array Assembly for Reliable Attachment/Detachment of Large-Area Thin Films onto Curved Surfaces
Keywords:
Polymeric Thin Film,
Manipulation,
Electrostatic Adhesion,
Robot Control,
Elastic Mechanics,
Fracture Mechanics
Pages 333-334
Details
