2023 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2023 JSPE Spring Conference
Location : [in Japanese]
Date : March 14, 2023 - March 16, 2023
Study on On-Machine Visualization of Surface Processing Phenomena in Nanoscale
8th report: Verification of Nano-particle Absolute Height Position Measurement using underwater-Invisible tilt surface
*Daiki Goto, Panart Khajornrungruang, Aran Blattler, Thitipat Permpatdechakul, Yuki Ohta
Author information
Keywords:
height measurement,
evanescent field,
multi-wavelength,
nano-particle,
interferometry,
invisible tilt resin
Pages 374-375
Details
